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Title Deep Etching of Silicon Based on Metal-Assisted Chemical Etching
Journal ACS Omega
Research Group 오일환 교수
Authors Anafi Nur’aini, Ilwhan Oh
Classification SCI(E)
Date 2022-05-07
Impact Factor 4.1
JIF Percentile 61.5
ISSN No. 2470-1343
Vol. / Page 7(19) / 16665
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